Phosphorus fluoride

CAS: 7783-55-3

Category: Inorganic Chemicals

PurityIndustrial Grade ≥99.0%; High-Purity Grade ≥99.9%; Semiconductor Grade ≥99.999%
Molecular FormulaPF3
Molecular Weight87.97
AppearanceColorless, toxic, corrosive gas with a pungent odor similar to garlic; usually supplied as a compressed liquefied gas.
PackagingSteel cylinders, high-pressure gas cylinders, or specialty fluorine-resistant alloy containers; typical laboratory packages include 1 L, 5 L, or 10 L cylinders.
Testing IndicatorsAppearance — Visual inspection; Purity — Gas chromatography (GC-TCD or GC-FID); Identification — FTIR or Raman spectroscopy; Phosphorus content — ICP-OES/ICP-MS; Fluorine content — Ion chromatography; Moisture — Karl Fischer coulometric titration; Trace metal impurities — ICP-MS; Residual oxygen/nitrogen impurities — GC analysis; Cylinder pressure and filling inspection according to compressed gas standards.
Storage NotesStore in a cool, dry, well-ventilated gas storage area. Keep containers tightly closed and secured upright. Protect from heat, moisture, and direct sunlight. Storage areas should be equipped with appropriate gas detection and ventilation systems. Keep away from water, oxidizers, and incompatible materials.
Lead Time10 days
Phosphorus fluoride (Phosphorus trifluoride, PF3) is an inorganic phosphorus halide compound mainly used as a specialized reagent in chemical synthesis, fluorination chemistry, and as a ligand in organometallic chemistry. It is also used in research involving metal-phosphorus complexes and semiconductor-related chemical processes.